| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a chemical supply device for minimizing the entry of water into a buffer chamber even in the case of the entry of the water inside from a fitting area between a chemical container and a support. <P>SOLUTION: A chemical supply device 1 includes a chemical container 2 in which chemical is stored, and a cup-shaped support 3 having an opening in the upper part. It is assembled by fitting the chemical container 2 to the support 3. The support 3 includes guide means 10 for allowing water entering inside from a fitting area T between the chemical container 2 and the support 3 to flow down along the inner wall face. The guide means 10 is constructed by a plurality of grooves 11 which are provided in the inner wall face of the support 3 extending downward. <P>COPYRIGHT: (C)2013,JPO&INPIT |
