发明名称 Process for fabricating metal bus lines for OLED lighting panels
摘要 Systems and methods for the design and fabrication of OLEDs, including high-performance large-area OLEDs, are provided. Variously described fabrication processes may be used to deposit and pattern bus lines with a smooth profile and a gradual sidewall transition. Such smooth profiles may, for example, reduce the probability of electrical shorting at the bus lines. Accordingly, in certain circumstances, an insulating layer may no longer be considered essential, and may be optionally avoided altogether. In cases where an insulating layer is not used, further enhancements in the emissive area and shelf life of the device may be achieved as well. According to aspects of the invention, bus lines such as those described herein may be deposited, and patterned, using vapor deposition such as vacuum thermal evaporation (VTE) through a shadow mask, and may avoid multiple photolithography steps. Other vapor deposition systems and methods may include, among others, sputter deposition, e-beam evaporation and chemical vapor deposition (CVD). A final profile of the bus line may substantially correspond to the profile as deposited.
申请公布号 US8432095(B2) 申请公布日期 2013.04.30
申请号 US201113105770 申请日期 2011.05.11
申请人 PANG HUIQING;LEVERMORE PETER;RAJAN KAMALA;KRALL EMORY;MA RUIQING (RAY);BURROWS PAUL E.;UNIVERSAL DISPLAY CORPORATION 发明人 PANG HUIQING;LEVERMORE PETER;RAJAN KAMALA;KRALL EMORY;MA RUIQING (RAY);BURROWS PAUL E.
分类号 H01J1/62;H01J63/04 主分类号 H01J1/62
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