| 摘要 |
PURPOSE: An electron microscope is provided to easily perform the rotation of a stage by comprising first and second position control units. CONSTITUTION: A stage(40) is positioned inside a chamber. A sample(30) is settled at the stage. A first position control unit controls the stage to move rectilinearly. A second position control unit(55) is formed on the chamber or the stage. The second position control unit controls the stage to rotate by the rectilinear movement of the first position control unit. The stage comprises a stage head(41), a head support(42), a head rotary shaft(43), and a rotation support(45).
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