| 摘要 |
PURPOSE: A remote control system of a gate valve is provided to transmit relevant commands to a main controller in which control commands are generated to open and close a gate valve, thereby obtaining reliability of command transmission and stable installation. CONSTITUTION: A remote control system of a gate valve comprises a first key pad(160), a second key pad(170), a pump commander(180), a main controller(190), and a gate valve driver(200). The first and second key pads are respectively arranged in a processing chamber(110) and a vacuum pump(140) to generate operation commands for operating a gate valve(130). The pump commander is located in one side of the vacuum pump to generate state commands about the state of the vacuum pump. The main controller generates relevant operation commands after processing signals while the relevant operation commands and state commands are received from the first and second key pads and the pump commander. The gate valve driver is connected to the gate valve to control the gate valve corresponding to the relevant control commands provided from the main controller. |
