GAS FITTING LOCKING APPARATUS FOR SEMICONDUCTOR AND LIQUID CRYSTAL DISPLAY PRODUCTION FACILITIES

摘要

PURPOSE: A gas fitting locking apparatus for a semiconductor and liquid crystal display production equipment are provided to limit accessibility to a locking apparatus by using a key member for releasing the locking apparatus. CONSTITUTION: A fitting supporting member(110) supports a fitting. A fitting cover member(120) locks and covers the fitting. A rotation member(105) rotatably connects the fitting supporting member and the fitting cover member. A lock member(140) fixes the fitting supporting member. The lock member locks the fitting supporting member and the fitting cover member.