| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical device capable of performing wavelength separation in a visible light region with high accuracy while lowering a production cost, and to provide a method of manufacturing the optical device, a wavelength variable filter, a wavelength variable filter module, and an optical spectrum analyzer. <P>SOLUTION: An optical device 1 comprises: a first driving electrode 28 arranged on a surface of a movable part 21 in a second structure 3 side; and a second driving electrode 33 arranged on a second structure 3 to face the first driving electrode 28. A first structure 2 and the second structure 3 are joined to each other via a metal layer 4 consisted of metal as a main material. The optical device 1 is configured so that voltage is applied between the first driving electrode 28 and the second driving electrode 33 using the metal layer 4 as an electric conductor, thereby electrostatic attraction force is generated between them, thereby the movable part 21 is displaced. <P>COPYRIGHT: (C)2013,JPO&INPIT |
