| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing apparatus which achieves stable polishing performance by keeping the tension of a polishing tape almost constant during polishing, and has an increased polishing speed. <P>SOLUTION: The polishing apparatus includes a polishing head 42 configured to bring a polishing tape 41 into contact with a workpiece and a swinging mechanism configured to cause the polishing head 42 to perform a swinging motion with its pivot laid on a predetermined point. The swinging mechanism includes a swing arm 60 to which the polishing head 42 is fixed, a support arm 62, a connection shaft 67 for rotatably connecting the swing arm 60 to the support arm 62, and a drive mechanism M1 causing the swing arm 60 to perform a swinging motion with its pivot laid on the connection shaft 67. The center point of the swinging motion of the polishing head 42 is on the center line of the connection shaft 67. <P>COPYRIGHT: (C)2013,JPO&INPIT |
