ACTIVE-FEEDBACK POSITIONAL DRIFT CORRECTION IN A MICROSCOPE IMAGE USING A FIDUCIARY ELEMENT HELD ON A NANOPOSITIONING STAGE

摘要

Stabilization, via active-feedback positional drift-correction, of an optical microscope imaging system in up to 3 -dimensions is achieved using the optical measurement path of an image sensor. Nanometer-scale stability of the imaging system is accomplished by correcting for positional drift using fiduciary references sparsely distributed within or in proximity to the experimental sample.