| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sensor sensitivity regulating means which enables miniaturization and cost reduction, and also the regulation of sensor sensitivity even in the case that a feedback capacity of a charge amplifier is small, and a manufacturing method of a sensor. <P>SOLUTION: The sensor sensitivity regulating means has main driving parts 11a and 11b, main detecting parts 12a and 12b and main reference parts 13a and 13b which are provided in arms 101a and 101b being vibrating portions, and respective electrodes of driving output pads 11e and 11f, driving lead-out parts 11c and 11d, detection output pads 12e and 12f, detection lead-out parts 12c and 12d, a reference output pad 13d and a reference lead-out part 13c which are provided in the base of a piezoelectric vibrator. Opposite electrode couples 14a and 14b are formed between parts of the detection lead-out parts 12c and 12d and parts of the driving lead-out parts 11c and 11d. When electrode fingers of these electrode couples are partially cut by laser trimming or the like, coupled capacitance between a driving electrode and a detecting electrode is decreased, while an amplification factor of the charge amplifier is increased, and the sensitivity of the whole of the sensor becomes high. <P>COPYRIGHT: (C)2010,JPO&INPIT |
