| 摘要 |
<p>The method comprises applying a substance containing donor on selected regions of a solar cell (12), and irradiating the selected regions with laser beam (10a), which consists of partial beams (22a, 22f). The partial beams: do not overlap each other, where the selected regions irradiated with the partial beams overlap each other; each have an inhomogeneous intensity distribution such as a Gaussian distribution; are simultaneously moved in a fixed spatial relation to each other relative to the solar cell; and meet adjacent to the solar cell with which the selected region is irradiated. The method comprises applying a substance containing donor on selected regions of a solar cell (12), and irradiating the selected regions with laser beam (10a), which consists of partial beams (22a, 22f). The partial beams: do not overlap each other, where the selected regions irradiated with the partial beams overlap each other; each have an inhomogeneous intensity distribution such as a Gaussian distribution; are simultaneously moved in a fixed spatial relation to each other relative to the solar cell; meet adjacent to the solar cell with which the selected region is irradiated; and are generated with a diffractive optical element. The irradiated regions overlap each other so that the doping in each selected region is homogeneous. The laser beam generates set of partial beams that are simultaneously directed on the solar cell, where each set of the partial beams contains partial beams. An independent claim is included for an apparatus for doping selected regions of a solar cell.</p> |
