发明名称 Semiconductor device and method of manufacturing the same
摘要 The semiconductor device includes a first MIS transistor including a gate insulating film 92, a gate electrode 108 formed on the gate insulating film 92 and source/drain regions 154, a second MIS transistor including a gate insulating film 96 thicker than the gate insulating film 92, a gate electrode 108 formed on the gate insulating film 96, source/drain regions 154 and a ballast resistor 120 connected to one of the source/drain regions 154, a salicide block insulating film 146 formed on the ballast resistor 120 with an insulating film 92 thinner than the gate insulating film 96 interposed therebetween, and a silicide film 156 formed on the source/drain regions 154.
申请公布号 US8426267(B2) 申请公布日期 2013.04.23
申请号 US201113010416 申请日期 2011.01.20
申请人 TSUTSUMI TOMOHIKO;EMA TAIJI;KOJIMA HIDEYUKI;ANEZAKI TORU;FUJITSU SEMICONDUCTOR LIMITED 发明人 TSUTSUMI TOMOHIKO;EMA TAIJI;KOJIMA HIDEYUKI;ANEZAKI TORU
分类号 H01L21/8234;H01L21/8238 主分类号 H01L21/8234
代理机构 代理人
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