| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sensor element, a method for manufacturing the sensor element, and a sensor device, capable of easily and securely exhibiting excellent detection sensitivity, and to provide a highly reliable electronic apparatus equipped with the sensor device. <P>SOLUTION: A sensor element includes: vibration arms 221, 222 for drive that are driven to vibrate by electric conduction; vibration arms 241, 242 for adjustment that oscillate following the drive vibration of the vibration arms 221, 222 for drive; electrodes for detection that output electric charge according to a physical amount applied to the vibration arms 221, 222 for drive; first electrodes that are provided for the vibration arms 241, 242 for adjustment, are electrically coupled to the electrodes for detection, and output electric charge following the oscillation of the vibration arms 241, 242 for adjustment; and a pair of second electrodes that are provided for the vibration arms 241, 242 for adjustment, are electrically coupled to a pair of electrodes for detection, and output electric charge in a polarity reverse to the first electrodes, following the oscillation of the vibration arms 241, 242 for adjustment. <P>COPYRIGHT: (C)2013,JPO&INPIT |
