| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide precise transfer equipment capable of performing precise movement, and also capable of performing accurate positioning based on accurate position detection. <P>SOLUTION: The precise transfer equipment comprises: a table held to a base; a rod 41 connected to the side surface of the table via a joint 6; a drive mechanism for advancingly and retractively driving the rod 41; and a laser interferometer for detecting the displacement of the table with respect to the base. The joint 6 is a supply/discharge static joint which has: a movement-side opposing surface 63 connected to the table 31 and perpendicular to the moving direction; a drive-side opposing surface 64 connected to the rod 41 and opposing the moving-side opposing surface 63; a fluid supply passage 66 for supplying fluid to a static clearance 65 formed between the moving-side opposing surface 63 and the drive-side opposing surface 64; and a fluid discharge passage for discharging the fluid from the static clearance 65. The laser interferometer has a laser light passage 56 in which a light axis progresses along the moving direction, and the laser light passage 56 penetrates the rod 41 or the drive-side opposing surface 64 and uses the moving-side opposing surface 63 as a reflecting surface. <P>COPYRIGHT: (C)2013,JPO&INPIT |
