| 摘要 |
PURPOSE: A manufacturing device for a substrate by laser drilling is provided to minimize the generation of inclined partitions and burrs by low output and to minify a device by operating without a galvanometer positioner. CONSTITUTION: A manufacturing device for a substrate by laser drilling comprises a condenser lens optical system(10), a focusing lens(30), a prism(60), a rotary motor(70), and a servo motor(50). The condenser lens optical system condenses a laser beam. The focusing lens is separately positioned from the condenser lens optical system by a predetermined distance and forms the focus of the laser beam passing through the optical system. The prism is separately positioned from the focusing lens by a predetermined distance. The incidence and emission planes of the laser beam in the prism are inclined with respect to an optical axis which is the central axis of the focusing lens. The prism rotates on the central axis. The rotary motor rotates the prism and allows the laser beam to form conical trajectory with respect to the optical axis. The servo motor allows a body tube(40) which is internally mounted with the prism to reciprocate with respect to the focusing lens. [Reference numerals] (AA) Laser beam; (BB) Spot; |
