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发明名称
摘要
申请公布号	JP5182775(B2)	申请公布日期	2013.04.17
申请号	JP20060078237	申请日期	2006.03.22
申请人		发明人
分类号	H01L29/68;H01L51/05;H01L51/50;H05B33/26	主分类号	H01L29/68
代理机构		代理人
主权项
地址

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