发明名称 Apparatus, system, and method for tunneling MOSFETs using self-aligned heterostructure source and isolated drain
摘要 Apparatuses, systems, and methods for tunneling MOSFETs (TFETs) using a self-aligned heterostructure source and isolated drain. TFETs that have an abrupt junction between source and drain regions have an increased probability of carrier direct tunneling (e.g., electrons and holes). The increased probability allows a higher achievable on current in TFETs having the abrupt junction.
申请公布号 US8421165(B2) 申请公布日期 2013.04.16
申请号 US20100777877 申请日期 2010.05.11
申请人 LOH WEI-YIP;JEON KANGHOON;PARK CHANRO;SEMATECH, INC. 发明人 LOH WEI-YIP;JEON KANGHOON;PARK CHANRO
分类号 H01L21/02;H01L21/336 主分类号 H01L21/02
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