发明名称 In-line equipment using metal-plate belt source for OLED manufacturing
摘要 An in-line apparatus for manufacturing an OLED(Organic Light Emitting Device) using a metal-plate belt is provided to prevent damage of a TFT array by transferring a substrate using a frictional force between rollers and a lower surface of the substrate. A metal plate belt(35) is laid across two metal plate rotating devices(33), so that the metal plate rotating devices rotate to transfer the metal plate belt continuously. A metal plate heating device(36) is positioned above a center portion of the metal plate belt to heat a portion of metal plates. A separating wall(32) is installed on a lower center portion of a vaporizing source module to prevent interference of vaporized organic materials.
申请公布号 KR101254335(B1) 申请公布日期 2013.04.12
申请号 KR20050114511 申请日期 2005.11.29
申请人 发明人
分类号 C23C14/24;H05B33/10 主分类号 C23C14/24
代理机构 代理人
主权项
地址