| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a beam scanning inspection apparatus and method that enable easy determination of nondefective/defective states, with a simple apparatus configuration. <P>SOLUTION: Light is received in an area narrower than a spot diameter in the main scanning direction, a peak light quantity of a beam emitted from a scanning optical system at plural image height positions in the main scanning direction is calculated in the state of beam scanning, and nondefective/defective states are determined on the basis of a peak light quantity corresponding to the respective image height positions in the main scanning direction. <P>COPYRIGHT: (C)2013,JPO&INPIT |
