MANUFACTURING METHOD OF ELECTROMECHANICAL CONVERSION FILM, ELECTRIC CONVERSION FILM MANUFACTURED BY THE SAME, ELECTROMECHANICAL CONVERSION ELEMENT, DROPLET DISCHARGE HEAD, AND DROPLET DISCHARGING DEVICE

摘要

PROBLEM TO BE SOLVED: To improve the quality of an electromechanical conversion film by suppressing heat diffusion of a bottom electrode to increase heating efficiency of a film of a sol gel liquid.

SOLUTION: An insulator film 202, disposed between a Si substrate 201 and a bottom electrode film 203, prevents heat of the bottom electrode film 203 generated by being heated by laser beam irradiation from conducting to the Si substrate 201. Almost all the heat of the bottom electrode film 203 conducts only to a PZT precursor film 204 coated on the bottom electrode film 203. Thus, the PZT precursor film 204 can be heated to a desired temperature.

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