| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser machining method capable of cutting a workpiece formed by crystalline quartz with good dimensional accuracy. <P>SOLUTION: The modified region 7 including a plurality of modified spots S is formed in the workpiece 1 along a planned cutting line 5 by focusing a laser beam L onto the workpiece 1. At that time, the workpiece 1 and the laser beam L are relatively moved along the planned cutting line 5 while irradiating the workpiece 1 with the laser beam L, and two or more modified spots S1 positioning inside the workpiece 1 are formed along the planned cutting line 5. Further, the workpiece 1 and the laser beam L are relatively moved along the line 5 while irradiating the workpiece 1 with the laser beam L, and two or more modified spots S2 exposed to the surface 3 of the workpiece 1 are formed along the line 5 so that any crack exposed to the surface 3 is not formed. <P>COPYRIGHT: (C)2013,JPO&INPIT |
