COMPOSITE CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To achieve operability of sample stage movement in a device having two charged particle beam lens barrels arranged orthogonal to each other.

SOLUTION: A composite charged particle beam device is used which includes: a focused ion beam lens barrel 4; an electron beam lens barrel 5 orthogonal to the focused ion beam lens barrel 4; a sample stage 2 which moves a sample 11; an optical microscope 14 which observes the sample 11; display parts 9, 10 capable of displaying a focused ion beam image, an electron beam image, and an optical microscope image; and a stage control part 3 which moves the sample stage 2 in accordance with a coordinate system of each image.

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