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发明名称
Nanoimprint Lithography System
摘要
申请公布号
EP2016613(B1)
申请公布日期
2013.04.10
申请号
EP20070734513
申请日期
2007.05.09
申请人
MOLECULAR IMPRINTS, INC.
发明人
RESNICK, DOUBLAS, J.;MAISSL, MARIO, J.;CHOI, BYUNG-JIN;SREENIVASAN, SIDIGATA, V.
分类号
G03F7/00;B82Y10/00;H01L21/67
主分类号
G03F7/00
代理机构
代理人
主权项
地址
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