| 摘要 |
PURPOSE: A MEMS resonant-type accelerometer is provided to structurally offsetting an error value due to thermal expansion caused by a temperature change by providing a resonant-type accelerometer having a DETF(Double-ended Tuning Fork) structure in which temperature sensitivity is minimized. CONSTITUTION: First and second inertial masses(10,20) have a square frame shape and are at a distance from a substrate in order to be movable. A first inertial mass is fixed on the substrate by a first anchor part(12a) and a second anchor part(12b) and is connected to be movable by being connected to connection members(14a,14b) having elasticity between the first and second anchor parts. A second inertial mass is fixed on the substrate in the same way with the first inertial mass(10) by a third anchor part(22a) and a fourth anchor part(22b) and is connected to be movable by being connected to connection members(24a,24b) having elasticity between the third and fourth anchor parts. An elastic body(30) is placed between the first inertial mass and the second inertial mass, makes the first and second inertial masses move in parallel by being connected with each other, and offsets the applied force with external force except acceleration. A tuning fork(40) is connected to the elastic body, measures frequency change due to acceleration applied to a MEMS resonant-type accelerometer, and is connected to the inner side of the elastic body by penetrating the opening part(31) of the elastic body. [Reference numerals] (AA) Acceleration applying direction; |
