METHOD FOR SEPARATING EPITAXIAL GROWTH LAYER FROM GROWTH SUBSTRATE

摘要

PURPOSE: An epi layer for separating a growth substrate and a method thereof are provided to easily separate the epi layer from a growth substrate by using a notch which is formed in the growth substrate. CONSTITUTION: A growth substrate(100) is formed. A notch(150) is formed in the edge of the growth substrate. An epi layer(410) is formed on the growth substrate. A support substrate(420) is adhered on the epi layer. The epi layer is separated from the growth substrate by using the notch.