| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device for applying process liquid having no air bubbles to a processed body. <P>SOLUTION: The resist coating device comprises: a nozzle 16 which drips process liquid into a processed body 8; a supply source 7 of the process liquid; a relay container 10 provided between the nozzle and the supply source which temporarily stores the process liquid from the supply source and then supplies it to the nozzle; and a control part which controls the relay container. The relay container comprises: a cylinder 9 which has a bottom; a piston 9a provided slidably in the cylinder; a drive source 5 of the piston; an air bubble discharge port 3 provided in the cylinder; and a sensor 6 which detects a position P of the piston. The piston moves according to volume of the process liquid stored in the relay container. When the process liquid with the volume Vs is discharged from the supply source to the relay container, the control part calculates volume Vp of storage space on the basis of the position P, determines that the process liquid in the cylinder contains air bubbles when Vp is larger than Vs, and discharges the process liquid containing the air bubbles from the air bubble discharge port by driving the piston with the drive source. <P>COPYRIGHT: (C)2013,JPO&INPIT |
