| 摘要 |
<P>PROBLEM TO BE SOLVED: To equalize the degree of crystallization of a light absorption layer in a chalcopyrite solar cell as much as possible. <P>SOLUTION: Predetermined number of laminates 66 each including a back electrode and a precursor layer formed, in this order, on a glass substrate are set on a quartz boat 64 in a treatment furnace 32 constituting a thermal treatment apparatus 30. Subsequently, the treatment furnace 32 is brought into an enclosed state, and a pressure vessel 34 disposed on the outside of the treatment furnace 32 is brought into an enclosed state. Pressure in the treatment furnace 32 is controlled within a range from the atmospheric pressure to 1000 kPa by supplying H<SB POS="POST">2</SB>Se and an inert gas into the treatment furnace 32, and an inert gas is supplied into the pressure vessel 34. Preferably, the pressure in the pressure vessel 34 is set higher than the pressure in the treatment furnace 32, and the pressure difference is set within a range of 20-100 kPa. Under this state, interior of the treatment furnace 32 is heated by means of a heater 70. <P>COPYRIGHT: (C)2013,JPO&INPIT |
