| 摘要 |
Provided are a porous valve metal thin film having a great surface area, a method for the production thereof, and a thin film capacitor having a great capacity density utilizing the thin film as an anode. The porous valve metal thin film is produced by a method comprising: 1) a step of preparing a thin film in which a valve metal and a hetero-phase component have a particle diameter within a range of from 1 nm to 1 µm, and the valve metal and the hetero-phase component are uniformly distributed; 2) a step of subjecting the thin film to a heat treatment so as to adjust the particle diameter and to appropriately sinter the film; and 3) a step of removing the hetero-phase portion, |
