| 摘要 |
Object To provide a substrate assembly apparatus capable of simplifying a structure of the apparatus and performing appropriate detachment of a substrate constantly. Solving Means A substrate assembly apparatus according to the present invention includes a support base and a holding mechanism. The support base is for supporting a lower substrate. The holding mechanism includes a holding surface and a functional element. The holding surface is for holding an upper surface of an upper substrate. The functional element is provided on the holding surface and has a holding force variable in accordance with a magnitude of a voltage. The holding mechanism causes a lower surface of the upper substrate to face an upper surface of the lower substrate supported by the support base. With this structure, it becomes possible to electrically control the holding force with respect to the substrate and simplify the structure of the holding mechanism. Further, since the holding force of the substrate can be changed smoothly, appropriate detachment is constantly allowed even with respect to a thin substrate. |
