发明名称 Production process for structure and production process for liquid discharge head
摘要 A production process for a structure includes preparing a substrate on which a first layer and a second layer are provided in this order; forming a second mold, which is a part of a mold member serving as a mold for forming the structure, from the second layer; etching the first layer using the second mold as a mask and thereby forming a first mold, which is another part of the mold member from the first layer; providing a coating layer which serves as the structure to cover the first mold and the second mold; and removing the first mold and the second mold and thereby forming the structure.
申请公布号 US8409454(B2) 申请公布日期 2013.04.02
申请号 US20100731563 申请日期 2010.03.25
申请人 HINO ETSUKO;SHIBA SHOJI;CANON KABUSHIKI KAISHA 发明人 HINO ETSUKO;SHIBA SHOJI
分类号 G01D15/00;G11B5/127 主分类号 G01D15/00
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