发明名称 Plasma processing method
摘要 <p>A delivery system (10) for delivering species to a processing chamber (14) for imparting a desired surface property to one or more large items—such as shoes—comprises: a first container (16) for filling with liquid species; a second container (18) for receiving liquid species from the first container (16); a first flow control means (20) for controlling a volume of liquid species which is allowed to flow from the first container to the second container (18); evaporation means (30) for evaporating liquid species in the second container; and a second flow control means (38) for controlling flow of evaporated species from the second container (18) to a processing chamber (14).</p>
申请公布号 GB2465932(B) 申请公布日期 2013.03.27
申请号 GB20100005210 申请日期 2008.09.25
申请人 P2I LTD 发明人 MALCOLM WOODCOCK
分类号 C23C16/448;B05D7/24;C23C16/44 主分类号 C23C16/448
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