| 摘要 |
PURPOSE: A method for manufacturing a cassette for carrying a wafer is provided to improve the productivity of the cassette by mechanically and automatically manufacturing the cassette to carry and store the wafer. CONSTITUTION: A support bar receiving unit includes a fixing frame(120), a bottom receiving frame, and a top receiving frame. The fixing frame is formed on the upper side of a base plate with a preset interval. A lateral side moving unit includes a support plate(200), a support bracket(210), a servo motor(220), and a jig assembly(250). A heater moving unit includes a heating plate(300), a plurality of heaters, and a left and right movable cylinder(320). The heating plate is installed between the support bar receiving unit and the lateral side moving unit. |
