| 摘要 |
PCT No. PCT/GB92/01373 Sec. 371 Date Jun. 27, 1994 Sec. 102(e) Date Jun. 27, 1994 PCT Filed Jul. 24, 1992 PCT Pub. No. WO93/02337 PCT Pub. Date Feb. 4, 1993A surface-measuring apparatus comprising a probe and means for moving the probe towards and away from a surface under examination and for monitoring such movement, the probe comprising a plurality of closely spaced light-collecting elements arranged in a light-collecting plane, lens means positioned to produce a sharply focussed image of said light collecting elements at an image plane movable relative to said surface by movement of the probe, illuminating means so arranged that the lens unit forms an illuminated spot image of it in the image plane in co-incidence with the image In the image plane of one of the light-collecting elements, and means for measuring the incidence of light on the said one of the light-collecting elements and on surrounding ones of those elements. In one embodiment (FIG. 1) the probe incorporates a bundle of, say, seven optical fibers which each have one end exposed at an end plane of the bundle and constituting a respective one the light-collecting elements, the fibers being connected at their other ends to photodiodes or other photodetector means for measuring the Incidence of light on the exposed ends of the fibers. In another embodiment, the light-collecting elements are the individual detector cells comprised in the detector array of a solid state camera, the cells being organized in groups each having a central cell and a plurality of surrounding cells, and the illuminating means may be a screen with appropriately located apertures illuminated from behind.
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