发明名称 |
UV Irradiation Apparatus Having UV Lamp-Shared Multiple Process Stations |
摘要 |
A UV irradiation apparatus for treating substrates includes: at least two process stations each provided with a UV transmissive window; at least one electric UV lamp using two electrodes in a gas tube extending over the UV transmissive windows of the process stations aligned along the gas tube and shared by the process stations; a UV transmissive zone disposed between the UV lamp and the process stations and provided with reflectors; and shutters for blocking UV light from being transmitted to the respective process stations independently.
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申请公布号 |
US2013068970(A1) |
申请公布日期 |
2013.03.21 |
申请号 |
US201113238960 |
申请日期 |
2011.09.21 |
申请人 |
MATSUSHITA KIYOHIRO;ASM JAPAN K.K. |
发明人 |
MATSUSHITA KIYOHIRO |
分类号 |
H01L21/26;B01J19/12 |
主分类号 |
H01L21/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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