发明名称 MODULAR COIL ARRAYS FOR PLANAR AND LINEAR MOTORS
摘要 Coil arrays are disclosed for a planar or linear motor. An exemplary coil array includes multiple coil modules. Each coil module includes at least one coil set, respective electrical circuitry to and from the coil set, at least one respective hydraulic cooling device for the coil set, and respective hydraulic conduitry to and from the cooling device. The coil modules are interchangeably mountable relative to each other in the array such that mounting the coil module to the array produces accompanying hydraulic and electrical connections between the array and coil module, and removing the coil module from the array severs the connections.
申请公布号 US2013069449(A1) 申请公布日期 2013.03.21
申请号 US201213621669 申请日期 2012.09.17
申请人 NIKON CORPORATION;NIKON CORPORATION 发明人 PHARAND MICHEL;BINNARD MICHAEL B.;MORIMOTO SHIGERU;MAHADESWARASWAMY CHETAN;INGRAM RICK K.;HATCH CHRISTOPHER EDWARD;POON ALEX KA TIM;KESWANI GAURAV;COON DEREK;CHOI YEONG-JUN
分类号 H02K15/06;H02K41/02 主分类号 H02K15/06
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