发明名称 POLISHING PAD
摘要 <p>A polishing pad for chemical mechanical polishing having at least a polishing layer, wherein the polishing surface of the polishing layer has a first groove and a second groove, and the first and the second grooves have side surfaces that are continuous with the polishing surface at the widthwise edges of each of the grooves. In the first groove, the angle between the polishing surface and the side surface continuous with the polishing surface is 105-150°on at least one widthwise edge of the groove. In the second groove, the angle between the polishing surface and the side surface continuous with the polishing surface is 60-105°on both widthwise edges of the groove.</p>
申请公布号 WO2013039181(A1) 申请公布日期 2013.03.21
申请号 WO2012JP73538 申请日期 2012.09.13
申请人 TORAY INDUSTRIES, INC.;NORO, YOHEI;OKUDA, RYOJI;FUKUDA, SEIJI 发明人 NORO, YOHEI;OKUDA, RYOJI;FUKUDA, SEIJI
分类号 H01L21/304;B24B37/26 主分类号 H01L21/304
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