DETECTING MASS ON A MEMS BIOOSCILLATING RESONATOR ARRAY

摘要

A system configured to determine the mass of an object. The system generates a first output signal by transmitting an excitation signal through an oscillating resonator array. The oscillating resonator array includes a first oscillating resonator, a second oscillating resonator; and an electronic component coupled between the first oscillating resonator and the second oscillating resonator. A user adds an object to a surface of the oscillating resonator array. After adding the object, the system generates a second output signal by transmitting the excitation signal through the oscillating resonator array and determines a phase difference between the first output signal and the second output signal.