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发明名称
Apparatus and method for measuring three-dimensional shape by using multi-wavelength patterns
摘要
申请公布号
EP2175233(B1)
申请公布日期
2013.03.20
申请号
EP20090172738
申请日期
2009.10.12
申请人
KOH YOUNG TECHNOLOGY INC.
发明人
KIM, MIN-YOUNG
分类号
G01B11/25
主分类号
G01B11/25
代理机构
代理人
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