发明名称 LASER IRRADIATION APPARATUS AND LASER IRRADIATION METHOD
摘要 <p>PURPOSE: A laser irradiating device and a laser irradiating method are provided to perform a laser processing while maintaining a constant distance to an object and to prevent possibilities of interference with the inner surface of the object from being increased. CONSTITUTION: A laser irradiating device comprises a laser beam transmission device, a condenser(11), a cylindrical housing unit(12), a fluid supply device(13), a positioning device, and a fluid guide unit(17). The housing unit receives the condenser inside, holds the condenser, and includes an opening(18) for irradiating laser beams condensed by the condenser to an object. The fluid supply device supplied fluid to inside the housing unit from a fluid source and discharges from the opening. The positioning device is arranged in the housing unit and in contact with the object, thereby being a constant distance between the condenser and the object. The fluid guide device guides the fluid discharged through the opening flow an axial direction of the housing unit.</p>
申请公布号 KR20130028632(A) 申请公布日期 2013.03.19
申请号 KR20120061918 申请日期 2012.06.11
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 CHIDA ITARU;HIROTA KEIICHI;SASAKI HIDEKAZU;UEHARA TAKUYA;SUETAKE TOMOKI;NOMURA HIROSHI
分类号 B23K26/08;B23K26/04;H01L31/10 主分类号 B23K26/08
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