| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a dual physical quantity sensor achieving a reduction in the number of components and cost. <P>SOLUTION: The dual physical quantity sensor includes: a pressure sensor 3A for detecting a pressure of a first object to be measured; a pressure sensor 3B for detecting a pressure of a second object to be measured; a temperature sensor 4 for detecting the temperature of the pressure sensors 3A and 3B; a correction unit for performing a first correction for eliminating a fluctuation, due to a change in temperature, from the detection signal of the pressure sensor 3A and a second correction for eliminating a fluctuation, due to a change in temperature, from the detection signal of the pressure sensor 3B; and a heat transfer member 8 which has thermal conductivity and whose one end 8a is in contact with the pressure sensors 3A and 3B and the other end 8b is in contact with the temperature sensor 4. The heat transfer member 8 includes an elastic portion 8c having elasticity between the one end 8a and the other end 8b. <P>COPYRIGHT: (C)2013,JPO&INPIT |
