| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a down-sized infrared temperature sensor having excellent sensitivity characteristics. <P>SOLUTION: An infrared temperature sensor 100 comprises an infrared detection element 21 formed of a first heat sensitive element 21 having a membrane structure, a temperature compensation element 22 formed of a second heat sensitive element 22 having a membrane structure, a substrate which supports the infrared detection element and the temperature compensation element, an infrared absorption film 30 which is formed on the infrared detection element, and an infrared radiation film 40 which is formed on the temperature compensation element and formed of the same material as the infrared absorption film. The infrared absorption film is formed only on the membrane structure of the first heat sensitive element. The infrared radiation film is formed across the membrane structure of the second heat sensitive element. <P>COPYRIGHT: (C)2013,JPO&INPIT |
