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发明名称
ANISOTROPIC STRESS GENERATION BY STRESS-GENERATING LINERS HAVING A SUBLITHOGRAPHIC WIDTH
摘要
申请公布号
EP2235744(B1)
申请公布日期
2013.03.13
申请号
EP20090704513
申请日期
2009.01.15
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
CLEVENGER, LAWRENCE, A.;DORIS, BRUCE, B.;HUANG, ELBERT, E.;PURUSHOTHAMAN, SAMPATH;RADENS, CARL, J.
分类号
H01L29/78;H01L21/311;H01L21/336;H01L21/8238
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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