METHOD OF SHEET PRODUCTION WITH REMOVAL FROM THE SURFACE OF A MELT USING ELASTICITY AND BUOYANCY
摘要
<p>Embodiments related to sheet production are disclosed. A melt of a material is cooled to form a sheet of the material on the melt. The sheet is formed in a first region at a first sheet height. The sheet is translated to a second region such that it has a second sheet height higher than the first sheet height. The sheet is then separated from the melt. A seed wafer may be used to form the sheet.</p>
申请公布号
EP2567001(A1)
申请公布日期
2013.03.13
申请号
EP20110707770
申请日期
2011.03.04
申请人
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
发明人
KELLERMAN, PETER, L.;SUN, DAWEI;HELENBROOK, BRIAN;HARVEY, DAVID, S.