| 摘要 |
A method for manufacturing a probe structure is provided to prevent distortion of a substrate by forming partially a supporting part on a substrate. An opening is formed on an upper surface of a substrate. A supporting part is formed at a partial region of the upper surface of the substrate. A probe(155) is formed to bury the opening and to be extended in a horizontal direction. The probe is supported by the probe. The probe is floated by etching the substrate corresponding to the opening. A connective part(160) is bonded with the probe to form a probe structure. The probe structure is separated from the substrate by removing the supporting part. |
