| 摘要 |
<P>PROBLEM TO BE SOLVED: To flatten dose distribution of electron beams. <P>SOLUTION: An electron gun 110 of an electron beam irradiation apparatus 100 emits electron beams EB, an accelerator 118 accelerates the electron beams emitted from the electron gun, and a scan horn 120 controls an irradiation direction of the electron beams accelerated by the accelerator. Furthermore, the scan horn performs at least unidirectional scan processing on an object W to be irradiated and in a turn of the scan processing, irradiation with electron beams is stagnated for a predetermined time. Therefore, dose distribution of electron beams can be flattened by uniformly irradiating the object to be irradiated with electron beams while complementing dose lack at a terminal part of the object to be irradiated in a width direction. <P>COPYRIGHT: (C)2013,JPO&INPIT |
