发明名称 Phase-change random access memory device and method of manufacturing the same
摘要 A phase-change random access memory device includes a semiconductor substrate, a bottom electrode structure formed on the semiconductor substrate, a cylindrical bottom electrode contact that includes a conductive material layer, which is in contact with the bottom electrode, and a cylindrical phase-change material layer that is in contact with the bottom electrode contact. Therefore, the contact area between the bottom electrode contact and the phase-change material layer can be minimized.
申请公布号 US8384135(B2) 申请公布日期 2013.02.26
申请号 US201113164490 申请日期 2011.06.20
申请人 SK HYNIX INC.;RYU CHEOL HWI;PARK HYUNG SOON;SHIN JONG HAN;PARK JUM YONG;KIM SUNG JUN 发明人 RYU CHEOL HWI;PARK HYUNG SOON;SHIN JONG HAN;PARK JUM YONG;KIM SUNG JUN
分类号 H01L27/148;H01L29/768 主分类号 H01L27/148
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