发明名称 Process for making a GaN substrate
摘要 In some embodiments, the invention relates to a process for making a GaN substrate comprising: transferring a first monocrystal GaN layer onto a supporting substrate; applying crystal growth for a second monocrystal GaN layer on the first layer; the first and second GaN layers thereby forming together the GaN substrate, the GaN substrate having a thickness of at least 10 micrometers, and removing at least one portion of the supporting substrate.
申请公布号 KR101236213(B1) 申请公布日期 2013.02.22
申请号 KR20097007430 申请日期 2007.09.11
申请人 发明人
分类号 H01L21/20;H01L33/02 主分类号 H01L21/20
代理机构 代理人
主权项
地址