| 摘要 |
PROBLEM TO BE SOLVED: To improve productivity by improving start-up in a chemical liquid supply initial stage, and to use time of the chemical liquid supply initial stage for production in a chemical liquid supply device for supplying chemical liquid to a nozzle device. SOLUTION: This device is provided with a main pump and a sub pump arranged in the way of a chemical liquid supply passage for supplying the chemical liquid to the nozzle device. The supply flow rate of the main pump and the sub pump at the time of start-up satisfies an expression; the main pump≤the sub pump; and the supply flow rate of the main pump and the sub pump at ordinary supply time satisfies an expression; the main pump > the sub pump. An expansion amount of inner volume of the main pump and the sub pump at the time of start-up satisfies an expression; the main pump > the sub pump. The relationship between the supply flow rate A of the sub pump at the time of start-up and a sum B of the expansion amount of the inner volume of the main pump and an increase amount of the inner volume of the chemical liquid supply passage at the time of start-up is expressed as follows; A≥B. COPYRIGHT: (C)2006,JPO&NCIPI |
