Acceleration sensor for sensing rotation acceleration around rotation axis, has coupling element pivotable around rotation axis perpendicular to main extension plane or deflectable along transverse direction

摘要

The sensor has a silicon substrate (2) comprising a main extension plane (100), and a seismic mass (10). Another seismic mass (20) is deflectable relative to the substrate. A detection unit (11) is utilized for detection of a deflection of the former seismic mass. The masses are coupled with each other by a rigid coupling element (30). The coupling element is pivotable around a rotation axis (101) perpendicular to the main extension plane or deflectable along transverse direction (103) parallel to the main extension plane and perpendicular to deflecting direction (102). An independent claim is also included for a method for operating an acceleration sensor.