| 摘要 |
PURPOSE: A composite sensor for temperature and humidity detection and a manufacturing method thereof are provided to remove restriction in the attachment position of a composite sensor by employing a thermopile with a non-contact type temperature measuring method. CONSTITUTION: A composite sensor for temperature and humidity detection comprises a thermopile sensor and a humidity sensor. The thermopile sensor comprises a lower silicon substrate(10), a diaphragm formed on the upper side of the lower silicon substrate, a thermocouple composed of first and second heat thermoelectric materials(14,15) formed on the top of the diaphragm, an insulating layer(16) formed on the top of the thermocouple, and air gaps(18,22) which is formed by etching the lower silicon substrate through etch holes formed in the insulating later and the diaphragm. The humidity sensor comprises an upper silicon substrate(20), a humidity sensor part(21) which is formed in the part except for an ultraviolet transmission window on the upper silicon substrate, and air gaps which are formed by etching the upper silicon substrate. |
