发明名称 Semiconductor device and method of manufacturing the same
摘要 A semiconductor device having a non-volatile memory and a method of manufacturing the same are provided. The semiconductor device includes a base material and a stack structure. The stack structure disposed on the base material at least includes a tunneling layer, a trapping layer and a dielectric layer. The trapping layer is disposed on the tunneling layer. The dielectric layer has a dielectric constant and is disposed on the trapping layer. The dielectric layer is transformed from a first solid state to a second solid state when the dielectric layer undergoes a process.
申请公布号 US8378410(B2) 申请公布日期 2013.02.19
申请号 US201213489611 申请日期 2012.06.06
申请人 MACRONIX INTERNATIONAL CO., LTD.;LAI SHENG-CHIH;LUE HANG-TING 发明人 LAI SHENG-CHIH;LUE HANG-TING
分类号 H01L29/66 主分类号 H01L29/66
代理机构 代理人
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